12 April 2007 Interferometric testing of aspheric components for EUV reduced camera
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Proceedings Volume 6611, Laser Optics 2006: High-Power Gas Lasers; 66110D (2007) https://doi.org/10.1117/12.740592
Event: Laser Optics 2006, 2006, St. Petersburg, Russian Federation
Abstract
Advanced techniques and scheme for testing mirror shape with an accuracy of 0.001&lgr; RMS in visible light by using the point diffraction interferometer and computer processing of interferogramms are presented. The shape of aspheric EUV mirror with 300 mm diameter is characterized.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Egor Gavrilov, Vladimir Kirillovsky, Peter Orlov, Nikolay Voznesensky, and Alexander Zhevlakov "Interferometric testing of aspheric components for EUV reduced camera", Proc. SPIE 6611, Laser Optics 2006: High-Power Gas Lasers, 66110D (12 April 2007); doi: 10.1117/12.740592; https://doi.org/10.1117/12.740592
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