17 April 2007 High-repetition rate UV lasers with inductive-capacitive discharge stabilization
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Proceedings Volume 6611, Laser Optics 2006: High-Power Gas Lasers; 66110F (2007) https://doi.org/10.1117/12.740595
Event: Laser Optics 2006, 2006, St. Petersburg, Russian Federation
Abstract
The high repetition rate UV lasers (XeF [1], KrF [2] and N2) with a new electrode unit are investigated. A multisectional discharge gap 25 cm length and 1.2 cm height is formed by 25 pairs of anode-cathode plates. The discharge width is ≈ 1 mm. The average specific pump power is ≈ 9 MW cm-3. The main aim of the work is the achievement of a maximum pulse repetition rate (fm) with high output energy stability. At a rather low gas flow velociity ⩽ 19 m s-1 the frequencies f as high as 4 kHz in the excimer lasers and 4.5 kHz in a nitrogen laser are realized. The relative rms deviations of the output energy (&sgr;) for XeF and KrF lasers is in the range 1-2% for f ⩽ 3 kHz and 3-4% for f = 4 kHz. For the nitrogen laser &sgr; ⩽ 1.3% is at f ⩽ 4.5 &kgr;&Ggr;ц.The average output power 10 (12) W for the XeF (KrF) laser and 1.1 W for the nitrogen laser are reached.
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A. V. Andramanov, S. A. Kabaev, B. V. Lazhintsev, V. A. Nor-Arevyan, A. V. Pisetskaya, V. D. Selemir, "High-repetition rate UV lasers with inductive-capacitive discharge stabilization", Proc. SPIE 6611, Laser Optics 2006: High-Power Gas Lasers, 66110F (17 April 2007); doi: 10.1117/12.740595; https://doi.org/10.1117/12.740595
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