15 May 2007 Effective extreme ultraviolet radiation source based on laser-produced plasma in supersonic xenon jet
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Abstract
Development of highly effective debris free EUV (extreme ultraviolet) radiation source is an actual problem today. Experimental results on EUV output from the source based on laser-produced plasma in supersonic Xe jet have been obtained. The conversion efficiency is 0.08% at a wavelength of 13.5 nm (Δλ = 0.35 nm, 2π sterrad). The methods of optimization of gas-jet converter have been determined. Measurements of EUV radiation energy dependence on the laser energy and the target material (solid-state Cu, Mo, W, Ta and supersonic Xe jet) have been made. The conversion efficiency of laser-produced plasma (CELPP) has been determined and the experimental values have been obtained for different materials of the target.
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S. V. Bobashev, I. V. Domracheva, M. V. Petrenko, G. K. Tumakaev, Z. A. Stepanova, "Effective extreme ultraviolet radiation source based on laser-produced plasma in supersonic xenon jet", Proc. SPIE 6614, Laser Optics 2006: Superintense Light Fields and Ultrafast Processes, 66140D (15 May 2007); doi: 10.1117/12.740210; https://doi.org/10.1117/12.740210
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