18 June 2007 Super-heterodyne laser interferometer using femtosecond frequency comb for linear encoder calibration system
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Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66160G (2007); doi: 10.1117/12.726247
Event: Optical Metrology, 2007, Munich, Germany
Abstract
A super-heterodyne laser interferometer for sub-nanometer length measurement system is proposed. This interferometer has a possibility to realize high resolution by using the self-zooming method and high accuracy by using external cavity diode laser which is stabilized to femtosecond frequency comb(fs-comb) as an optical source. This length measurement system is going to be applied for linear-encoder calibration system for national standards.
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Mariko Kajima, Hirokazu Matsumoto, "Super-heterodyne laser interferometer using femtosecond frequency comb for linear encoder calibration system", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66160G (18 June 2007); doi: 10.1117/12.726247; https://doi.org/10.1117/12.726247
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KEYWORDS
Interferometers

Signal detection

Calibration

Helium neon lasers

Computer programming

Semiconductor lasers

Laser stabilization

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