18 June 2007 Dispersive white light interferometry for 3D inspection of thin film layers of flat panel displays
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Abstract
Emerging possibility of applying white-light interferometry to the area of thin-film metrology is addressed. Emphasis is given to explaining underlying spectrally-resolved interferometric principles of white-light interferometry for measuring the top surface profile as well as the thickness of thin-film layers, which enables one to reconstruct the complete 3-D tomographical view of the target surface coated with thin-film layers. Actual measurement results demonstrate that white-light interferometry in either scanning or dispersive scheme is found well suited for high speed 3-D inspection of dielectric thin-film layers deposited on semiconductor or glass substrates.
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Young-Sik Ghim, Young-Sik Ghim, Joonho You, Joonho You, Seung-Woo Kim, Seung-Woo Kim, "Dispersive white light interferometry for 3D inspection of thin film layers of flat panel displays", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66160T (18 June 2007); doi: 10.1117/12.726040; https://doi.org/10.1117/12.726040
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