18 June 2007 Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements
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Abstract
This paper presents measurements of calibrated step height and pitch standards using a homodyne interferometer-based metrological scanning probe microscope (SPM) and a nanopositioning and nanomeasuring machine (NPM machine). These devices were developed at the Institute of Process Measurement and Sensor Technology of the Technische Universität Ilmenau. Together these devices are capable of highly exact dimensional and traceable long-range positioning and measurement with a resolution of 0.1 nm over the positioning and measurement range of 25 mm × 25 mm × 5 mm. Measurements of different calibrated step height and pitch standards were completed in order to test the repeatability and accuracy of the metrological SPM. The deviations between the calibrated and measured values were smaller than the uncertainty values determined by the Physikalisch-Technische Bundesanstalt (PTB) calibration. The extended uncertainty of the measurement results (step height or mean pitch value) was less than 1 nm.
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N. Dorozhovets, N. Dorozhovets, T. Hausotte, T. Hausotte, G. Jäger, G. Jäger, E. Manske, E. Manske, "Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661624 (18 June 2007); doi: 10.1117/12.726230; https://doi.org/10.1117/12.726230
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