Advances in emerging technologies of microelectromechanical systems (MEMS) and nanotechnology, especially
relating to the applications, constitute one of the most challenging tasks in today's micromechanics and nanomechanics.
In addition to design, analysis, and fabrication capabilities, this task also requires advanced test methodologies for
determination of functional characteristics of devises produced to enable verification of their operation as well as
refinement and optimization of specific designs. In particular, development of miniscule devices requires sophisticated
design, analysis, fabrication, testing, and characterization tools. These tools can be categorized as analytical,
computational, and experimental. Solutions using the tools from any one category alone do not usually provide
necessary information on MEMS and extensive merging, or hybridization, of the tools from different categories is used.
One of the approaches employed in this development of structures of contemporary interest, is based on a combined use
of the analytical, computational, and experimental solutions (ACES) methodology. Development of this methodology
was made possible by recent advances in optoelectronic methodology, which was coupled with the state-of-the-art
computational methods, to offer a considerable promise for effective development of various designs. This approach
facilitates characterization of dynamic and thermomechanical behavior of the individual components, their packages, and
other complex material structures. In this paper, recent advances in optoelectronic methodology for micro-and nanoscale
measurements are described and their use is illustrated with representative examples.