Digital Shack-Hartmann Wavefront Sensor for toroidal surface measurement

N. Bai; Li. P. Zhao; X. Li; Zhong P. Fang

doi:10.1117/12.726057

18 June 2007 Digital Shack-Hartmann Wavefront Sensor for toroidal surface measurement

N. Bai, Li. P. Zhao, X. Li, Zhong P. Fang

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 661644 (2007) https://doi.org/10.1117/12.726057
Event: Optical Metrology, 2007, Munich, Germany

Abstract

Shack-Hartmann Wavefront Sensor (SHWS) recently has been extensively researched for optical surface metrology due to its extendable dynamic range compared with the interferometry technique. In our institute, we have developed a digital SHWS by adopting a programmable Spatial Light Modulator (SLM) to function as a microlens array and replace the physical one in the traditional configuration of this sensing system. In this paper, we proposed to use the developed system for the relative measurement of toroidal surfaces, which are widely used in many optical systems due to their unique optical features of different curvatures in X and Y directions. An innovative idea to design the diffractive microlens array implemented by SLM was presented to tackle the measurement challenge. This unconventional design approach has a great advantage to provide different optical powers in X and Y directions so that focusing spots can be formed and captured on the detector plane for accurate centroid finding and precise wavefront evaluation for 3D shape reconstruction of the toroidal surface. A digital Shack-Hartmann Wavefront Sensing system with this unique microlens array was built to verify the design concept, and the experimental results were presented and analyzed.

Citation Download Citation

N. Bai, Li. P. Zhao, X. Li, and Zhong P. Fang "Digital Shack-Hartmann Wavefront Sensor for toroidal surface measurement", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661644 (18 June 2007); https://doi.org/10.1117/12.726057

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available