18 June 2007 Digital Shack-Hartmann Wavefront Sensor for toroidal surface measurement
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Abstract
Shack-Hartmann Wavefront Sensor (SHWS) recently has been extensively researched for optical surface metrology due to its extendable dynamic range compared with the interferometry technique. In our institute, we have developed a digital SHWS by adopting a programmable Spatial Light Modulator (SLM) to function as a microlens array and replace the physical one in the traditional configuration of this sensing system. In this paper, we proposed to use the developed system for the relative measurement of toroidal surfaces, which are widely used in many optical systems due to their unique optical features of different curvatures in X and Y directions. An innovative idea to design the diffractive microlens array implemented by SLM was presented to tackle the measurement challenge. This unconventional design approach has a great advantage to provide different optical powers in X and Y directions so that focusing spots can be formed and captured on the detector plane for accurate centroid finding and precise wavefront evaluation for 3D shape reconstruction of the toroidal surface. A digital Shack-Hartmann Wavefront Sensing system with this unique microlens array was built to verify the design concept, and the experimental results were presented and analyzed.
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N. Bai, Li. P. Zhao, X. Li, Zhong P. Fang, "Digital Shack-Hartmann Wavefront Sensor for toroidal surface measurement", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661644 (18 June 2007); doi: 10.1117/12.726057; https://doi.org/10.1117/12.726057
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