18 June 2007 Optical metrology devices for high-power laser large optics
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Abstract
High power laser systems such as the LMJ laser or the LIL laser, its prototype, require large optical components with very strict and various specifications. Technologies used for the fabrication of these components are now usually compatible of such specifications, but need the implementation at the providers' sites of different kind of metrology like interferometry, photometry, surface inspection, etc., systematically performed on the components. So, during the production for the LIL and now for the LMJ, CEA has also equipped itself with a wide range of specific metrology devices used to verify the effective quality of these large optics. These various systems are now used to characterize and validate the LMJ vendors' processes or to perform specific controls dedicated to analyzes which are going further than the simple "quality control" of the component (mechanical mount effect, environment effect, ageing effect,...). After a short introduction on the LMJ laser and corresponding optical specifications for components, we will focus on different metrology devices concerning interferometry and photometry measurements or surface inspection. These systems are individually illustrated here by the mean of different results obtained during controls done in the last few years.
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J. Daurios, J. Daurios, S. Bouillet, S. Bouillet, G. Gaborit, G. Gaborit, J. C. Poncetta, J. C. Poncetta, "Optical metrology devices for high-power laser large optics", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661645 (18 June 2007); doi: 10.1117/12.726071; https://doi.org/10.1117/12.726071
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