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Xe excimer lamps are used as VUV source for industrial application like surface cleaning. To determine the VUV
efficiency of the lamp the radiant flux need to be known. Due to the difficulties of VUV measurements, it is often
determined by interpolation from a value of a fixed angle, which results in large uncertainties. Here a goniometric setup
is presented to measure the radiant flux of VUV sources like Xe excimer lamps which emit a narrow spectral band in the
VUV range between &lgr; = 147 nm and 200 nm with a peak at 172 nm and spectral lines in NIR. By the use of two
monochromators, we measure the spectral resolved radiant flux from 120 nm to 1000 nm. The measurement uncertainty
of 9.7 % is rather low for the VUV spectral range and depends mainly on the uncertainty of the used deuterium
calibration standard from PTB (7%). Due to the strong temperature dependence of the transmission edge of silica used
for the lamp vessel, the measurements are done in nitrogen atmosphere to ensure the convection cooling of the lamp. We
measured the radiance distribution curve and radiant flux of Xe excimer lamps and could show the angle dependence of
the spectrum. The measured correlation between the VUV band and the NIR lines gives us a better understanding of the
plasma kinetics, which is used to optimize the pulsed excitation of the lamp.
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