Sharp trench waveguide bend with photonic crystals: simulation, fabrication and characterisation

Xudong Cui; Christian Hafner; Franck Robin; Daniel Erni; Kakhaber Tavzarashvili; Ruediger Vahldieck

doi:10.1117/12.726017

18 June 2007 Sharp trench waveguide bend with photonic crystals: simulation, fabrication and characterization

Xudong Cui, Christian Hafner, Franck Robin, Daniel Erni, Kakhaber Tavzarashvili, Ruediger Vahldieck

Proceedings Volume 6617, Modeling Aspects in Optical Metrology; 66170D (2007) https://doi.org/10.1117/12.726017
Event: Optical Metrology, 2007, Munich, Germany

Abstract

In this paper, a three dimensional analysis of an ultra-compact sharp trench waveguide bend structure modified with small local photonic crystals is presented. The structure used here is based on a previous proposal [1]. To fully investigate the behavior of the structure, especially mode coupling and off plane radiation losses - (that are ignored in two dimensional calculations [1]) as well as the limitations caused by the effective index approximation in the two-dimensional (2D) simulations, we simulated realistic three dimensional structures using the finite integration technique. Furthermore, a structure on an InP substrate is compared with a Si/SiO2 based structure in order to check the influence of vertical index contrast on the device performance. One of the structures based on InP substrate was then fabricated and characterized to validate our conceptual predictions.

Citation Download Citation

Xudong Cui, Christian Hafner, Franck Robin, Daniel Erni, Kakhaber Tavzarashvili, and Ruediger Vahldieck "Sharp trench waveguide bend with photonic crystals: simulation, fabrication and characterization", Proc. SPIE 6617, Modeling Aspects in Optical Metrology, 66170D (18 June 2007); https://doi.org/10.1117/12.726017

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