11 July 2007 Micro actuated grating for multi-beam optical pickups
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Proceedings Volume 6620, Optical Data Storage 2007; 66200I (2007) https://doi.org/10.1117/12.738632
Event: Optical Data Storage 2007, 2007, Portland, OR, United States
A stress-induced curved \micro actuator with a grating attached at the end is demonstrated for recordable optical storage applications. The actuator and the grating were fabricated using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity from the grating were generated when a voltage is applied to the actuator to switch its position. The single-beam and multi-beam configurations can be used for writing and reading data in the disc, respectively.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chi-Hung Lee, Chi-Hung Lee, Yi Chiu, Yi Chiu, Han-Ping D. Shieh, Han-Ping D. Shieh, } "Micro actuated grating for multi-beam optical pickups", Proc. SPIE 6620, Optical Data Storage 2007, 66200I (11 July 2007); doi: 10.1117/12.738632; https://doi.org/10.1117/12.738632

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