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5 September 2007 Circular motion control of an optically trapped microprobe for nano-position sensing
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Abstract
As a position sensing probe for Nano-CMM which measures three-dimensional shapes of microparts, we propose a novel probing technique using circular motion of an optically trapped microsphere. In this report, a fundamental principle is described for sensing a coordinate on a work surface using a circular motion probe. The circular motion of the trapped sphere near a work surface becomes an ellipse compressed perpendicularly to the surface due to the change of viscous drag of the sphere. The elliptical orbit of the trapped sphere depends on a distance from the surface and a normal vector direction of the surface. By processing the elliptical orbit, the circular motion probe can detect a position and a plane normal vector of the work surface simultaneously. In order to verify feasibility of this method, fundamental experiments are carried out. The circular motion probe is approached to a vertical silicon cleavage surface. The behavior of the trapped sphere near the surface agrees well with the theory. Based on the elliptical orbit of the trapped sphere near the surface, a position and a plane normal vector of the surface are estimated. It is verified that the circular motion probe can detect a position of a work surface with resolution of better than 50nm and detect a plane normal vector of the surface.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuto Nagasaka, Yasuhiro Takaya, and Terutake Hayashi "Circular motion control of an optically trapped microprobe for nano-position sensing", Proc. SPIE 6644, Optical Trapping and Optical Micromanipulation IV, 66441K (5 September 2007); https://doi.org/10.1117/12.734471
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