Holographic fabrication of photonic nanostructures for optofluidic integration

Seung-Kon Lee; Sung-Gyu Park; Ji-Hwan Kang; Jun Hyuk Moon; Seung-Man Yang

doi:10.1117/12.733562

11 September 2007 Holographic fabrication of photonic nanostructures for optofluidic integration

Seung-Kon Lee, Sung-Gyu Park, Ji-Hwan Kang, Jun Hyuk Moon, Seung-Man Yang

Proceedings Volume 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV; 66451G (2007) https://doi.org/10.1117/12.733562
Event: NanoScience + Engineering, 2007, San Diego, California, United States

Abstract

Holographic lithography is one of the promising techniques that can create three-dimensional (3D) periodic nanostructures without extensive lithography and etching steps. This proceeding discusses novel hybrid lithographic methods based on the holographic lithography in conjunction with photolithography to generate hierarchically-patterned structures. Using various types of photoresists including positive, negative and hydrogel, we fabricated 3D nanopatterns by holographic lithography. Then, two-dimensional (2D) photolithography was combined to pattern the 3D structures. Eventually, we created a microfluidic channel with 3D periodic patterns. Since the 3D structure possess photonic bandgap properties as well as interconnected pore networks, this kind of microfluidic channel can be applied to optical sensors, mixers and filters.

Citation Download Citation

Seung-Kon Lee, Sung-Gyu Park, Ji-Hwan Kang, Jun Hyuk Moon, and Seung-Man Yang "Holographic fabrication of photonic nanostructures for optofluidic integration", Proc. SPIE 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV, 66451G (11 September 2007); https://doi.org/10.1117/12.733562

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