Micro-opto-electro-mechanical system (MOEMS) for microstructure manipulation and optical characterization

Jose A. Martinez; Tao Liu; Roberto R. Panepucci

doi:10.1117/12.734827

11 September 2007 Micro-opto-electro-mechanical system (MOEMS) for microstructure manipulation and optical characterization

Jose A. Martinez, Tao Liu, Roberto R. Panepucci

Author Affiliations +

Proceedings Volume 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV; 664525 (2007) https://doi.org/10.1117/12.734827
Event: NanoScience + Engineering, 2007, San Diego, California, United States

Abstract

Microstructure manipulation is a fundamental process to further the study of biology and medicine, as well as to advance micro- and nano-system applications. The manipulation of micro and nanostructures has been achieved through various microgripper devices developed recently, which lead to advances in single cell manipulation and micromachine assembly. However, the physical, mechanical, optical and chemical information about the microstructure under study is usually extracted from macroscopic instrumentation, such as confocal microscopy and Raman spectroscopy. In this paper we describe the design, simulation, fabrication and characterization (mechanical and optical) of a novel Micro-Opto-Electro-Mechanical-System (MOEMS) optical microgripper. This is the first device of this kind, which enables the direct manipulation, mechanical characterization, and simultaneous optical characterization of microstructures. Optical fluorescence measurements or identification, as well as absorption spectroscopy are possible with this new device. The device is implemented in SU-8 due to its suitable optical and mechanical properties. The current generation of the device was designed to manipulate structures with dimensions lower than ~5 μm.

Citation Download Citation

Jose A. Martinez, Tao Liu, and Roberto R. Panepucci "Micro-opto-electro-mechanical system (MOEMS) for microstructure manipulation and optical characterization", Proc. SPIE 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV, 664525 (11 September 2007); https://doi.org/10.1117/12.734827

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available