12 September 2007 Integration, interoperability, and information management: What are the key issues for nanomanufacturing?
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Abstract
Nanomanufacturing can be defined as all manufacturing activities that collectively support an approach to design, produce, control, modify, manipulate, and assemble nanometer scale objects and features for the purpose of fabricating a product or system that exploits properties seen at the nanoscale. This includes information technologies and systems that support each aspect of this collective approach. This paper focuses on research topics centered on information technology for manufacturing and metrology applications that are broadly grouped into three categories: integration, interoperability, and information management.
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Kevin W. Lyons, Kevin W. Lyons, } "Integration, interoperability, and information management: What are the key issues for nanomanufacturing?", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480D (12 September 2007); doi: 10.1117/12.735615; https://doi.org/10.1117/12.735615
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