10 September 2007 Nano-precision dynamic motion control
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Abstract
This paper presents digital motion control algorithms, real-time implementation, and experimental results for dynamic motion control. A digital control system that includes robust feedback, previewed feedforward, and repetitive control action is implemented on a piezoelectric actuator driven mechanical stage and is demonstrated to achieve nanometer level dynamic precision.
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Chi-Ying Lin, Chi-Ying Lin, Tsu-Chin Tsao, Tsu-Chin Tsao, } "Nano-precision dynamic motion control", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480H (10 September 2007); doi: 10.1117/12.738689; https://doi.org/10.1117/12.738689
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