10 September 2007 Combining coordinate measurement and nanometrology for large-range nanoscale metrology
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Abstract
The Nanometer-Coordinate-Measuring-Machine (NCMM) is developed for comparatively fast large area scans with high resolution for measuring critical dimensions. The system combines a metrological atomic force microscope (AFM) with a precise positioning system. The sample is moved under the probe system via the positioning system achieving a scan range of 25 x 25 x 5 mm3 with a resolution of 1.24 nm. An AFM has a resolution beyond the wavelength of light and is a material-variable sensor. The cantilever of the used AFM can only be moved up and down via a monolytic piezoblock avoiding dynamic crosstalk. Combined with the up and down movement of the positioning system a multistage measurement is achieved. Through its overall coordinate system, the NCMM can scan very fast, since just regions of interest have to be scanned and no stitching procedures are needed afterwards. The measurements are traceable to the meter-definition since all movements of the drives and the AFMs cantilever are measured via laser-interferometers and the Abbé-principle is kept in every dimension. To meet thermal demands, materials with low thermal expansion coefficients are used and the metrological frame is kept small. A focus is on automating the measurements by the use of a-priori-knowledge of the sample, optical navigation and image processing.
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Martin Gruhlke, Martin Gruhlke, Hendrik Rothe, Hendrik Rothe, } "Combining coordinate measurement and nanometrology for large-range nanoscale metrology", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480I (10 September 2007); doi: 10.1117/12.733527; https://doi.org/10.1117/12.733527
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