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10 September 2007 Silicon test object of the linewidth of the nanometer range for SEM and AFM
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Abstract
The results of the study of a test object on scanning electron microscopes and atomic force microscopes are presented. The test object presents a relief on a monosilicon surface, and it is fabricated by the anisotropic etching of monosilicon. The relief elements have a trapezoidal profile with large angles of inclination of the sidewalls. The sides of the relief elements coincide with the crystallographic planes {100} and {111} of silicon. The test object is intended for calibration of scanning electron microscopes and atomic force microscopes.
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Yu. A. Novikov, V. P. Gavrilenko, Yu. V. Ozerin, A. V. Rakov, and P. A. Todua "Silicon test object of the linewidth of the nanometer range for SEM and AFM", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480R (10 September 2007); https://doi.org/10.1117/12.733134
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