Translator Disclaimer
Paper
10 September 2007 Measurements of linear sizes of relief elements in the nanometer range using a scanning electron microscope
Author Affiliations +
Abstract
We present results of the study of forming the image in a scanning electron microscope (SEM). The effects of the electron beam energy and of the beam diameter on the signal profile are demonstrated. Methods of SEM calibration including the measurement of the electron beam diameter are presented. The formulas relating the size of the trapezoidal structures to the length of the reference portions of the SEM signals are presented. Examples of measurements of linear sizes of relief structures are given.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. P. Gavrilenko, M. N. Filippov, Yu. A. Novikov, A. V. Rakov, and P. A. Todua "Measurements of linear sizes of relief elements in the nanometer range using a scanning electron microscope", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480T (10 September 2007); https://doi.org/10.1117/12.733566
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
Back to Top