Measurements of linear sizes of relief elements in the nanometer range using a scanning electron microscope

V. P. Gavrilenko; M. N. Filippov; Yu. A. Novikov; A. V. Rakov; P. A. Todua

doi:10.1117/12.733566

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10 September 2007 Measurements of linear sizes of relief elements in the nanometer range using a scanning electron microscope

V. P. Gavrilenko, M. N. Filippov, Yu. A. Novikov, A. V. Rakov, P. A. Todua

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Proceedings Volume 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing; 66480T (2007) https://doi.org/10.1117/12.733566
Event: NanoScience + Engineering, 2007, San Diego, California, United States

Abstract

We present results of the study of forming the image in a scanning electron microscope (SEM). The effects of the electron beam energy and of the beam diameter on the signal profile are demonstrated. Methods of SEM calibration including the measurement of the electron beam diameter are presented. The formulas relating the size of the trapezoidal structures to the length of the reference portions of the SEM signals are presented. Examples of measurements of linear sizes of relief structures are given.

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V. P. Gavrilenko, M. N. Filippov, Yu. A. Novikov, A. V. Rakov, and P. A. Todua "Measurements of linear sizes of relief elements in the nanometer range using a scanning electron microscope", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480T (10 September 2007); https://doi.org/10.1117/12.733566

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