All-elastic motorized flexure stages have been developed for critical metrology applications where X-Y runout of the
motion must be less than 300 nm over a 10 mm stroke. The design was adapted from a highly stable flat-blade flexure
stage that was manually driven and used in several instruments where long term stability of adjustments were important.
The adaptations included a motor-driven miniature ball screw, a Z axis position sensor repeatable to 10 microns and
elastic strain relief between the ball nut and the driven table. In-situ testing of the actuators demonstrated that they met
or exceeded all specifications for their performance.