Micro-lens maker equation of a CMOS image sensor

Yang Wu

doi:10.1117/12.729197

18 September 2007 Micro-lens maker equation of a CMOS image sensor

Yang Wu

Proceedings Volume 6668, Novel Optical Systems Design and Optimization X; 66680O (2007) https://doi.org/10.1117/12.729197
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

The demand of a large resolution CMOS image sensor (CIS) in a small package drives the pixel pitch size down to the neighborhood of 2 μm. Double-micro-lens (ML) structure is a promising technology to obtain the high focusing capability required by such a small pixel. In this work, an optical model of a double-ML is derived from the well-known lens maker equation. This model predicts the critical back focal length (BFL) and the effective focal length (EFL) of the double-ML embedded in the Back-End-Of-The-Line (BEOL) stack. Explained by this model, a design guideline is provided to optimize the amount of light collected by the photo diode area for a good quantum efficiency (QE), which is crucial to the sensitivity of the sensor.

Citation Download Citation

Yang Wu "Micro-lens maker equation of a CMOS image sensor", Proc. SPIE 6668, Novel Optical Systems Design and Optimization X, 66680O (18 September 2007); https://doi.org/10.1117/12.729197

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