14 September 2007 Aspheric measurement based on the curvature sensing method
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Abstract
We present a method of aspheric surface profile measurement based on the principle of curvature sensor, which measures the curvature of subaperture topography along a line and then reconstructs the entire profile from the measured local curvature data. The subaperture topography is obtained by using white-light scanning interferomtery to avoid the optical alignment error along an optical axis. Test measurement results demonstrate that the proposed method and system is well suited for the aspheric surface profile measurement.
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YongKwan Kwon, YongKwan Kwon, ByoungChang Kim, ByoungChang Kim, Duck Hyun Wang, Duck Hyun Wang, YunWoo Lee, YunWoo Lee, HoSoon Yang, HoSoon Yang, HyugGyo Rhee, HyugGyo Rhee, "Aspheric measurement based on the curvature sensing method", Proc. SPIE 6671, Optical Manufacturing and Testing VII, 667119 (14 September 2007); doi: 10.1117/12.734117; https://doi.org/10.1117/12.734117
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