Aspheric measurement based on the curvature sensing method

YongKwan Kwon; ByoungChang Kim; Duck Hyun Wang; YunWoo Lee; HoSoon Yang; HyugGyo Rhee

doi:10.1117/12.734117

14 September 2007 Aspheric measurement based on the curvature sensing method

YongKwan Kwon, ByoungChang Kim, Duck Hyun Wang, YunWoo Lee, HoSoon Yang, HyugGyo Rhee

Author Affiliations +

Proceedings Volume 6671, Optical Manufacturing and Testing VII; 667119 (2007) https://doi.org/10.1117/12.734117
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

We present a method of aspheric surface profile measurement based on the principle of curvature sensor, which measures the curvature of subaperture topography along a line and then reconstructs the entire profile from the measured local curvature data. The subaperture topography is obtained by using white-light scanning interferomtery to avoid the optical alignment error along an optical axis. Test measurement results demonstrate that the proposed method and system is well suited for the aspheric surface profile measurement.

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YongKwan Kwon, YongKwan Kwon, ByoungChang Kim, ByoungChang Kim, Duck Hyun Wang, Duck Hyun Wang, YunWoo Lee, YunWoo Lee, HoSoon Yang, HoSoon Yang, HyugGyo Rhee, HyugGyo Rhee, "Aspheric measurement based on the curvature sensing method", Proc. SPIE 6671, Optical Manufacturing and Testing VII, 667119 (14 September 2007); doi: 10.1117/12.734117; https://doi.org/10.1117/12.734117

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