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3D phase micro-object studies by means of digital holographic tomography supported by algebraic reconstruction technique
Generation of partially coherent light in rough surface scattering and suppression of the speckle it produces
Calibration of integrating sphere system designed for roughness correction in optical calibration of gauge blocks
Measurement of ultra low film stress, local stress distribution and flatness by imaging nanotopography based on low coherence phase shifting interferometry in conjunction with wafer and film thickness metrology
Ellipsometric porosimetry: fast and non destructive method of porosity characterization of solid oxide fuel cell material based on YSZ thin film
Development of a precision dual level stage system for the dimensional metrology of large range surface topography