11 September 2007 Auto-scanning white-light interferometer
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Abstract
This study proposes the auto-focusing procedure and the scan-range determining algorithm for white-light scanning interferometry. During white-light scanning interferometry, the interference fringe must be located and to the best-focus interferogram identified. The vertical-scan range must also be determined prior to the scanning procedure. A series of images, either in-focus or out-of-focus, are collected in a proposed interference-fringe searching step. The contrast and the sharpness indices of each image are calculated and applied in the auto-focusing scheme, and the vertical-scan range is determined accordingly. Some preliminary experiments are performed to demonstrate that the best-focus interferogram can be located precisely and the vertical-scan range can be determined.
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Jin-Liang Chen, Jin-Liang Chen, Chi-Hong Tung, Chi-Hong Tung, Ching-Fen Kao, Ching-Fen Kao, Calvin C. Chang, Calvin C. Chang, } "Auto-scanning white-light interferometer", Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 667204 (11 September 2007); doi: 10.1117/12.733625; https://doi.org/10.1117/12.733625
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