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10 September 2007 Experimental reconstruction for inverse scattering of one-dimensional surfaces
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Abstract
We have studied the inverse scattering problem as an optimization problem for a 1-D surface. As the input data for our self-adaptation genetic algorithm for surface inversion, the scattered intensity has been measured with the laser BRDF instruments. In addition, the transmission data are collected. The typical reconstruction of inverse scattering for a 1-D random surface is compared with the profile measured by an atomic force microscope (AFM).
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zu-Han Gu and Anting Wang "Experimental reconstruction for inverse scattering of one-dimensional surfaces", Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720H (10 September 2007); https://doi.org/10.1117/12.732559
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