10 September 2007 Polarization of grating diffraction simulated by vector Kirchhoff model
Author Affiliations +
The polarization of diffraction by a sawtooth reflection grating has been previously measured with fixed in and out directions while the grating was turned. The measured polarization and depolarization can provide more information about grating diffraction. The efficiency and polarization of diffraction by the two sawtooth facets are simulated based on the vector formulation of the Kirchhoff diffraction theory. The simulated diffraction pattern for the two-facet model agrees well with the measured one especially near the two specular peaks. The simulated diffraction polarization agrees with the measured one for diffraction orders with efficiency greater than 1%. For diffraction orders with efficiency < 1%, other diffraction mechanisms also come into place.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Soe-Mie Foeng Nee, Soe-Mie Foeng Nee, Tsu-Wei Nee, Tsu-Wei Nee, "Polarization of grating diffraction simulated by vector Kirchhoff model", Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720J (10 September 2007); doi: 10.1117/12.733780; https://doi.org/10.1117/12.733780


Physical principles of monolithic high-contrast gratings
Proceedings of SPIE (February 19 2017)
Polarization characterization for target surfaces
Proceedings of SPIE (June 01 1995)
Threshold and resonance effects in diffraction gratings
Proceedings of SPIE (October 24 2000)

Back to Top