13 September 2007 Stoichiometric lithium niobate thin films preparation by sol-gel method
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We present our studies on preparation of LiNbO3 oriented stoichiometric thin films by sol-gel method. The technology of synthesis of precursor systems, containing Li and Nb, has been developed. Studies of structure, morphology, optical and physical properties were carried out. The lattice parameters have been determined and correspond to stoichiometric lithium niobate crystals. The crystallographic orientation of LiNbO3 films corresponds to orientation of a sapphire substrate, i.e. on substrates with orientation (0001) the C axis of film is perpendicular to a substrate surface, and on (11-20) substrate C axes lays in a plane of a substrate. The developed method allowed to obtain lithium niobate thin films with 300-700 nm thickness, transparent, with precise crystallographic orientation both on sapphire substrate and conductive ZnO films.
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Armen R. Poghosyan, Armen R. Poghosyan, Ruyan Guo, Ruyan Guo, Alexandr L. Manukyan, Alexandr L. Manukyan, Stepan G. Grigoryan, Stepan G. Grigoryan, } "Stoichiometric lithium niobate thin films preparation by sol-gel method", Proc. SPIE 6698, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications, 66981C (13 September 2007); doi: 10.1117/12.734353; https://doi.org/10.1117/12.734353

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