Sol-gel method of p-type zinc oxide films preparation

Armen R. Poghosyan; XiaoNan Li; Alexandr L. Manukyan; Stepan G. Grigoryan; Eduard S. Vardanyan

doi:10.1117/12.734442

17 September 2007 Sol-gel method of p-type zinc oxide films preparation

Armen R. Poghosyan, XiaoNan Li, Alexandr L. Manukyan, Stepan G. Grigoryan, Eduard S. Vardanyan

Proceedings Volume 6698, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications; 66981D (2007) https://doi.org/10.1117/12.734442
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Both n-type and p-type ZnO will be required for development of homojunction light-emitting diodes and laser diodes. It is easy to obtain strong n-type ZnO, but very difficult to create consistent, reliable, high-conductivity p-type material. Here we present our investigations of p-type ZnO thin film preparation by sol-gel method using single Li doping and Ga(Al)+N codoping technique. ZnO thin films with c-axis orientation have been prepared on glass substrates. Zn acetate dihydrate, gallium nitrate and acetamide were used as zinc, gallium and nitrogen precursors respectively. SEM, X-ray diffraction, electric conductivity and Hall effect measurements were carried out. The results show that p-type conducting ZnO films with hole concentrations as high as 5x10¹⁷ cm^-3 were obtained by this method.

Citation Download Citation

Armen R. Poghosyan, XiaoNan Li, Alexandr L. Manukyan, Stepan G. Grigoryan, and Eduard S. Vardanyan "Sol-gel method of p-type zinc oxide films preparation", Proc. SPIE 6698, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications, 66981D (17 September 2007); https://doi.org/10.1117/12.734442

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