12 October 2007 EUV lasers on low-inductive capillary discharges
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Abstract
Results of experimental and numerical researches of problems, connected with creation of compact EUV lasers with a close geometry of electrodischarge systems, with long transporting lines for its energy supply and preliminary gas preionization by running wave of avalanche sliding discharge are reported. Both pumping schemes with collision excitation on example of neon-like ions of argon and collision recombination on example of hydrogen-like ions of nitrogen are considered. The input energy balance and questions of matching between a transport line and a discharge load are studying. Processes, limiting radiative properties of active media in both pumping schemes are discussed.
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Vladimir A. Burtsev, Vladimir A. Burtsev, Evgeniy P. Bolshakov, Evgeniy P. Bolshakov, Nikolay V. Kalinin, Nikolay V. Kalinin, Vitaliy A. Kubasov, Vitaliy A. Kubasov, Vadim I. Chernobrovin, Vadim I. Chernobrovin, } "EUV lasers on low-inductive capillary discharges", Proc. SPIE 6702, Soft X-Ray Lasers and Applications VII, 67020R (12 October 2007); doi: 10.1117/12.733685; https://doi.org/10.1117/12.733685
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