Visit My Account to manage your email alerts.
Progress report on a 14.4-nm micro-exposure tool based on a laser-produced-plasma: debris mitigation system results and other issues
Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application
Micro- and nanoprocessing of organic polymers using a compact laser plasma EUV source equipped with EUV optical systems
Measurement of attosecond XUV pulses generated with polarization gating by two-dimensional photoelectron spectroscopy