20 September 2007 Flat-field calibration of CCD detector for long trace profiler
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The next generation of synchrotrons and free electron lasers requires x-ray optical systems with extremely high-performance, generally, of diffraction limited quality. Fabrication and use of such optics requires highly accurate metrology. In the present paper, we discuss a way to improve the performance of the Long Trace Profiler (LTP), a slope measuring instrument widely used at synchrotron facilities to characterize x-ray optics at high-spatial-wavelengths from approximately 2 mm to 1 m. One of the major sources of LTP systematic error is the detector. For optimal functionality, the detector has to possess the smallest possible pixel size/spacing, a fast method of shuttering, and minimal nonuniformity of pixel-to-pixel photoresponse. While the first two requirements are determined by choice of detector, the non-uniformity of photoresponse of typical detectors such as CCD cameras is around 2-3%. We describe a flat-field calibration setup specially developed for calibration of CCD camera photo-response and dark current with an accuracy of better than 0.5%. Such accuracy is adequate for use of a camera as a detector for an LTP with performance of ~0.1 microradian (rms). We also present the design details of the calibration system and results of calibration of a DALSA CCD camera used for upgrading our LTP-II instrument at the ALS Optical Metrology Laboratory.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jonathan L. Kirschman, Jonathan L. Kirschman, Edward E. Domning, Edward E. Domning, Keith D Franck, Keith D Franck, Steven C. Irick, Steven C. Irick, Alastair A. MacDowell, Alastair A. MacDowell, Wayne R. McKinney, Wayne R. McKinney, Gregory Y. Morrison, Gregory Y. Morrison, Brian V. Smith, Brian V. Smith, Tony Warwick, Tony Warwick, Valeriy V. Yashchuk, Valeriy V. Yashchuk, "Flat-field calibration of CCD detector for long trace profiler", Proc. SPIE 6704, Advances in Metrology for X-Ray and EUV Optics II, 67040J (20 September 2007); doi: 10.1117/12.732618; https://doi.org/10.1117/12.732618


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