20 September 2007 Development of refractive x-ray focusing optics at Diamond Light Source
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The Diamond Optics & Metrology Group and the collaborators at the STFC Central Microstructure Facility have initiated a program for the design and fabrication of in-line micro- and nano-focusing optics for synchrotron radiation beamlines. The first type of optics fabricated is a kinoform lens in silicon on the same model proposed by K. Evans- Lutterodt et al [Opt. Expr. 11 (2003) 919.]. The fabrication utilised ultra high resolution electron beam lithographic patterning of an electron sensitive SU8 polymer and deep reactive ion etching of silicon. The first test of the focusing properties was performed at the ESRF BM5 optics beamline. In this paper we present details on the design and fabrication, and discuss the test results.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. Alianelli, K. J. S. Sawhney, I. M. Loader, D. W. K. Jenkins, R. Stevens, A. Snigirev, I. Snigireva, "Development of refractive x-ray focusing optics at Diamond Light Source", Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 670507 (20 September 2007); doi: 10.1117/12.737350; https://doi.org/10.1117/12.737350


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