2 October 2007 Nanopositioning of the silicon planar lenses used for 2D high energy x-ray nanofocusing
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Abstract
Nanopositioners have been integrated into a system to perform 2D focusing of the X-ray beam by using silicon planar lenses in cross geometry. Those positioners have been tested in the ESRF metrology laboratory to measure their resolutions. The whole system was found to have a good tunability; it is compact and led to an easy alignment of the two lenses along the common beam axis. Experiments were made with this system at the BM05 ESRF beamline using the Micro-optics test bench.
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P. Van Vaerenbergh, P. Van Vaerenbergh, A. Snigirev, A. Snigirev, M. A. Nicola, M. A. Nicola, I. Snigireva, I. Snigireva, M. Grigoriev, M. Grigoriev, V. Yunkin, V. Yunkin, G. Vaughan, G. Vaughan, L. Claustre, L. Claustre, H-P. Van Der Kleij, H-P. Van Der Kleij, J-Y. Massonnat, J-Y. Massonnat, } "Nanopositioning of the silicon planar lenses used for 2D high energy x-ray nanofocusing", Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 670508 (2 October 2007); doi: 10.1117/12.737324; https://doi.org/10.1117/12.737324
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