27 September 2007 Open-loop performance of a MEMS reflective wavefront sensor
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Sandia National Laboratory has constructed several segmented MEMS deformable mirrors that are under investigation for their suitability in experimental Adaptive Optics systems for the Naval Research Laboratory. These mirrors are fabricated in a hexagonal array and can been constructed with flat surfaces, or with optical power allowing each mirror to bring its subaperture of light to a focus similar to a Shack-Hartman array. Each mirror can use the tip, tilt and piston function to move the focused spots to the desired reference location, and the measurement of the applied voltage can be used directly to power a similar flat MEMS deformable mirror. Unlike the Shack-Hartman array, this wavefront sensor can detect large magnitude aberrations up to and beyond where the focused spots overlap, due to the ability to dither each focused spot. This paper reports on experiments and analysis of the open-loop performance, including repeatability measurements.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jonathan R. Andrews, Jonathan R. Andrews, Scott W. Teare, Scott W. Teare, Sergio R. Restaino, Sergio R. Restaino, David Wick, David Wick, Christopher C. Wilcox, Christopher C. Wilcox, Ty Martinez, Ty Martinez, } "Open-loop performance of a MEMS reflective wavefront sensor", Proc. SPIE 6711, Advanced Wavefront Control: Methods, Devices, and Applications V, 67110E (27 September 2007); doi: 10.1117/12.740322; https://doi.org/10.1117/12.740322


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