15 September 2007 Large area sample holder unit for enhanced near field microscopy applications
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Proceedings Volume 6716, Optomechatronic Sensors and Instrumentation III; 67160E (2007) https://doi.org/10.1117/12.754194
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland
Abstract
Near-field microscopy applications sometimes require scanning the sample over the millimetre range. This paper describes a home-made displacement system that can replace the limited range XY scanner of a classical near-field microscope. The system lays on a coarse/fine displacements configuration to attain the millimetre. Nanometre scale repeatability and resolution are met thanks to a control loop based on phase shifting techniques. The system was tested under an Atomic Force Microscope. The setup of the experiments and the results obtained are herein presented.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ahmad Sinno, Pascal Ruaux, Luc Chassagne, Suat Topçu, Yasser Alayli, Gilles Lerondel, Pascal Royer, Aurélien Bruyant, Sylvain Blaise, "Large area sample holder unit for enhanced near field microscopy applications", Proc. SPIE 6716, Optomechatronic Sensors and Instrumentation III, 67160E (15 September 2007); doi: 10.1117/12.754194; https://doi.org/10.1117/12.754194
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