You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
10 September 2007MEMS tunable silicon Fabry-Perot cavity
In this paper we present an innovative tunable Fabry-Perot cavity micromachined in silicon. A short summary of the
theoretical background of these filters is presented, followed by technical requirements for the design of the dielectric
mirror composing the Fabry-Perot cavity and the cavity itself. Simulations and experimental data are demonstrated to be
in good agreement. An in plane design is used to allow easy fiber alignment. The Fabry-Perot is tuned by an electrostatic
comb drive actuator supported by a set of four springs to achieve a uniform modulation of the air gap of the filter. Only
15.4 V are required to tune the Fabry-Perot over 73nm bandwidth (covering more than the whole C-band) with a FWHM
varying from 6 to 10nm. Transmission losses are -11dB.