MEMS tunable silicon Fabry-Perot cavity

Jonathan Masson; Fatou Binetou Koné; Yves-Alain Peter

doi:10.1117/12.754325

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10 September 2007 MEMS tunable silicon Fabry-Perot cavity

Jonathan Masson; Fatou Binetou Koné; Yves-Alain Peter

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Proceedings Volume 6717, Optomechatronic Micro/Nano Devices and Components III; 671705 (2007) https://doi.org/10.1117/12.754325
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland

Abstract

In this paper we present an innovative tunable Fabry-Perot cavity micromachined in silicon. A short summary of the theoretical background of these filters is presented, followed by technical requirements for the design of the dielectric mirror composing the Fabry-Perot cavity and the cavity itself. Simulations and experimental data are demonstrated to be in good agreement. An in plane design is used to allow easy fiber alignment. The Fabry-Perot is tuned by an electrostatic comb drive actuator supported by a set of four springs to achieve a uniform modulation of the air gap of the filter. Only 15.4 V are required to tune the Fabry-Perot over 73nm bandwidth (covering more than the whole C-band) with a FWHM varying from 6 to 10nm. Transmission losses are -11dB.

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Jonathan Masson, Fatou Binetou Koné, and Yves-Alain Peter "MEMS tunable silicon Fabry-Perot cavity", Proc. SPIE 6717, Optomechatronic Micro/Nano Devices and Components III, 671705 (10 September 2007); https://doi.org/10.1117/12.754325

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