20 December 2007 Extended lifetime of fluoride optics
Author Affiliations +
Surface and coating technology plays an important role for extending lifetime of fluoride optics for ArF excimer laser applications. Optically finished CaF2 optics is characterized as top surface and subsurface by means of non-distractive quasi-Brewster angle technique. The subsurface is revealed by removing the top surface via distractive methods. Color centers on plasma ion and laser irradiated CaF2 optics are discussed. The results suggest that fluorine depletion is associated with laser damage, dense smooth coatings enable one to extend the lifetime of CaF2 optics.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jue Wang, Colleen R. Clar, Horst Schreiber, "Extended lifetime of fluoride optics", Proc. SPIE 6720, Laser-Induced Damage in Optical Materials: 2007, 67200I (20 December 2007); doi: 10.1117/12.753045; https://doi.org/10.1117/12.753045

Back to Top