Laser damage of silica and hafnia thin films made with different deposition technologies

Laurent Gallais; Jérémie Capoulade; Jean-Yves Natoli; Mireille Commandré; Michel Cathelinaud; Cian Koc; Michel Lequime

doi:10.1117/12.752952

20 December 2007 Laser damage of silica and hafnia thin films made with different deposition technologies

Laurent Gallais, Jérémie Capoulade, Jean-Yves Natoli, Mireille Commandré, Michel Cathelinaud, Cian Koc, Michel Lequime

Author Affiliations +

Proceedings Volume 6720, Laser-Induced Damage in Optical Materials: 2007; 67200S (2007) https://doi.org/10.1117/12.752952
Event: Boulder Damage Symposium XXXIX: Annual Symposium on Optical Materials for High Power Lasers, 2007, Boulder, Colorado, United States

Abstract

A comparative study is made on the laser damage resistance of monolayers coatings made with different technologies. HfO₂ and SiO₂ thin films have been deposited on fused silica substrates with Dual Ion Beam Sputtering, Electron Beam Deposition (with and without Ion Assistance) and Reactive Low Voltage Ion Plating technologies. The laser damage thresholds of these coatings have been determined at 1064nm and 355nm using a nanosecond pulsed YAG laser, and a 1-on-1 test procedure.

Citation Download Citation

Laurent Gallais, Jérémie Capoulade, Jean-Yves Natoli, Mireille Commandré, Michel Cathelinaud, Cian Koc, and Michel Lequime "Laser damage of silica and hafnia thin films made with different deposition technologies", Proc. SPIE 6720, Laser-Induced Damage in Optical Materials: 2007, 67200S (20 December 2007); https://doi.org/10.1117/12.752952

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE