A novel photo-thermal setup for evaluation of absorptance losses and thermal wavefront deformations in DUV optics

K. Mann; A. Bayer; T. Miege; U. Leinhos; B. Schäfer

doi:10.1117/12.776945

18 December 2007 A novel photo-thermal setup for evaluation of absorptance losses and thermal wavefront deformations in DUV optics

K. Mann, A. Bayer, T. Miege, U. Leinhos, B. Schäfer

Author Affiliations +

Proceedings Volume 6720, Laser-Induced Damage in Optical Materials: 2007; 67201B (2007) https://doi.org/10.1117/12.776945
Event: Boulder Damage Symposium XXXIX: Annual Symposium on Optical Materials for High Power Lasers, 2007, Boulder, Colorado, United States

Abstract

For an assessment of the optical quality of DUV optics, a high-sensitivity wavefront analyzer system based on the Hartmann-Shack principle is employed. The device accomplishes precise on-line monitoring of wavefront deformations of a collimated test beam transmitted through the laser-irradiated site of a sample. Due to the achieved sub-nm resolution, it can be used as an alternative to calorimetric and interferometric measurements for 'at wavelength' testing of optics, e.g. for on-line registration of thermal lensing effects or compaction in fused silica. By recording wavefront distortions of fused silica samples of different thickness and at different fluences the contribution of bulk and surface to the total absorption as well as one- and two-photon effects can be separated.

Citation Download Citation

K. Mann, A. Bayer, T. Miege, U. Leinhos, and B. Schäfer "A novel photo-thermal setup for evaluation of absorptance losses and thermal wavefront deformations in DUV optics", Proc. SPIE 6720, Laser-Induced Damage in Optical Materials: 2007, 67201B (18 December 2007); https://doi.org/10.1117/12.776945

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available