Research on the AI-AIN granular films prepared by D.C. magnetism filter arc deposition

Haifeng Liang; Yang Zhou; Changlong Cai

doi:10.1117/12.782828

14 November 2007 Research on the AI-AIN granular films prepared by D.C. magnetism filter arc deposition

Haifeng Liang, Yang Zhou, Changlong Cai

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67220D (2007) https://doi.org/10.1117/12.782828
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Aluminum- Aluminum nitride (Al-AlN) granular films were grown on silicon substrate by using D.C. magnetism filter arc deposition. X-ray diffraction, X-ray photoelectron spectroscopy, optical microscopy, surface profiler were carried out to character films' properties. The crystalline orientation, chemical content, surface morphology were researched. The result shows that the films mainly consist of aluminum and nitrogen elements from XPS spectrum, and aluminum and aluminum nitride interfere peak in XRD spectrum were all observed. Furthermore, no metal macro-droplet can be observed from surface morphology.

Citation Download Citation

Haifeng Liang, Yang Zhou, and Changlong Cai "Research on the AI-AIN granular films prepared by D.C. magnetism filter arc deposition", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67220D (14 November 2007); https://doi.org/10.1117/12.782828

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