Study on the effects of depositing parameters on the protection performance of plasma polymerized hexamethyldisiloxane coatings

Rongfu Zhang; Xumin Zhu; Chao Pan

doi:10.1117/12.782915

16 November 2007 Study on the effects of depositing parameters on the protection performance of plasma polymerized hexamethyldisiloxane coatings

Rongfu Zhang, Xumin Zhu, Chao Pan

Author Affiliations +

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67220Z (2007) https://doi.org/10.1117/12.782915
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Aluminium thin film is widely used for high reflectivity reflector. However, it is readily corroded in a variety of environments and in oxygen saturated water. Coatings deposition on it is considered as a way of increasing its corrosion resistance. Among all available deposition techniques, the use of plasma-assisted technologies has grown rapidly. Organosilicon monomers have been successfully used as precursors of Si-based films and among them hexamethyldisiloxane (HMDSO) has gained increasing interest owing to its lower cost and higher deposition rates comparing to similar silicon containing monomers. This work studies the effects of depositing parameters on the structure and composition of the coating and at last on the corrosion protection performance concerning their use as protective coatings on reflective aluminum metallisations. Therefore, we have done a serial of experiments and got corresponding samples with different parameters such as HMDSO glow discharge power and depositing time. In the experiments, the plasma polymerized HMDSO thin films have been obtained in a DC glow discharge from the monomer vapor. And then the corrosion protection performances are analyzed by environment experiments. To analyze the reason of the deposition parameters effect on protection performances, the chemical structure and composition of the films have been analyzed.

Citation Download Citation

Rongfu Zhang, Xumin Zhu, and Chao Pan "Study on the effects of depositing parameters on the protection performance of plasma polymerized hexamethyldisiloxane coatings", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67220Z (16 November 2007); https://doi.org/10.1117/12.782915

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
4 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Plasma

Silicon

Chemical analysis

Polymers

Polymer thin films

Thin film coatings

Thin films

Show All Keywords

Keywords/Phrases

Search In:

Publication Years