High-reflection coating is a very important and representative optical film. Highly reflecting film is more and more extensive in the application of the laser,and has more and more high requests.The need of high energy and high power laser system has greatly promoted the research of high reflectance film. At present, the research strength and result of all-dielectric high-reflection coating present the acceleration tendency.
The paper is to study the film system design and manufacture of highly reflecting film that spread out a certain reflection bandwidth. (The bandwidth is 400nm-700nm. The reflectivity is bigger than or equal to 99%,and the light is vertical incidence). According to the design theory of high-reflection film , carry on the design and the making of the film.
Based on the quality of the material and application of the film, at the same time ,in consideration of the absorption and scattering of the film, choose the suitable material and special craft. Adopt OMS to monitor the films thickness in the process of manufacture, and use the Ion Assistant Deposition system to improve the structure and quality of film, increase the firm and compactness of film ,reduce the absorption. Through test again and again and unceasingly optimize the parameter, the result of measuring turns out that both ideal curve and practical curve is very similar and it attains the technological request .