The principle of solid abrasives lapping is that the abrasives are fixed and made into a special lapping tool; the workpiece is lapped in high speed lapping machine tool. It possesses many advantages compared with traditional low speed lapping with particulate abrasives, e.g. high machining efficiency, low machining cost, high and stable machining accuracy. So the highly efficient lapping method has been paid close attention to. This paper made a study on surface micro topography of different material by solid abrasive lapped at high speed. In experiments the lapping technique parameter is fixed, and different workpiece which are made by T10 steel, carbide, ceramic glass and alumina ceramics are lapped. The surface micro topography is measured by SEM, from the measuring result, it can be known that there is some shallow scribe on the surface of T10 steel, and the obvious plastic deformation can be observed. The SEM pictures show that there is some scribe on the surface of ceramics glass after lapped, with more magnification times many micro cracking and some plastic hump can be observed on the scribe. These scribes and humps are first cause of depressing surface quality, and these micro cracking can result in a lot of diffuse reflection on workpiece surface, it decreases the glossiness of mirror surface. On the surface of alumina ceramics there are a lot of defects, the size of such defect is more than the scribe of abrasive, it can be sure that the defect is not produced by lapping, so the material quality is an important effect fact to surface macro topography. On the surface of carbide there are a little of scribe and air cavity, and the scribe is very shallow; the defect of powder metallurgy martial is the primary reason.