14 November 2007 Design and fabrication of soft x-ray transmission phase gratings
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Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67223R (2007) https://doi.org/10.1117/12.783542
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China
Abstract
A binary transmission phase grating is designed to operate as a dispersive element used in soft x-ray plasma diagnostic in ICF (inertial confinement fusion). The first and zero orders diffraction efficiency is simulated as a function of wave length and grating thickness. It is shown that the first order diffraction efficiency of a transmission phase grating can be up to 23.3% of the incident light, whereas that is not more than 10% for a conventional amplitude transmission grating. The transmission phase grating is fabricated in gold film supported by polyimide membranes using holography and ion beam etching method. The primary experimental results are presented.
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Keqiang Qiu, Xiangdong Xu, Ying Liu, Yilin Hong, Shaojun Fu, "Design and fabrication of soft x-ray transmission phase gratings", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67223R (14 November 2007); doi: 10.1117/12.783542; https://doi.org/10.1117/12.783542
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