14 November 2007 Ion beam figuring system in NUDT
Author Affiliations +
Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67224A (2007) https://doi.org/10.1117/12.783658
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China
Abstract
Ion beam figuring (IBF) is an optical fabrication technique that provides highly deterministic process to correct surface figure error of previously polished surfaces by using a directed, inert and neutralized ion beam to physically sputter material from the optic surface. Recently, an ion beam figuring system KDIFS-500 has been designed and built in National University of Defense Technology (NUDT) of the P.R. China. KDIFS-500 is capable of processing workpiece up to Φ500mm. Line scanning process was discussed in detail for estimating the parameters of the beam removal function (BRF) in process. Experiments were conducted to demonstrate that the BRF increases gradually in process and by employing a stability control, the BRF can be kept stable in process. Finally, a Φ95 mm plano optical sample of CVD coated SiC substrate has been figured in two process iterations for demonstrating the correction capability of the KDIFS-500. Their figure convergence ratios reached 5.8 and 2.1 respectively. The actual figure residual errors were basically consistent with the predicted error. These consistencies indicated that the IBF processes on KDIFS-500 are predictable deterministic processes.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lin Zhou, Lin Zhou, Xuhui Xie, Xuhui Xie, Yifan Dai, Yifan Dai, Changjun Jiao, Changjun Jiao, Shengyi Li, Shengyi Li, } "Ion beam figuring system in NUDT", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67224A (14 November 2007); doi: 10.1117/12.783658; https://doi.org/10.1117/12.783658
PROCEEDINGS
6 PAGES


SHARE
RELATED CONTENT

Nano scale finishing of off axis aspheric mirror by ion...
Proceedings of SPIE (November 17 2014)
Manufacturing and testing large SiC mirrors in an efficient way
Proceedings of SPIE (September 23 2015)
Ion beam milling of silicon carbide optical components
Proceedings of SPIE (January 31 1994)
CVD silicon carbide mirrors for EUV applications
Proceedings of SPIE (October 22 1995)

Back to Top