Whole visible range imaging ellipsometry

Hau-Wei Wang; Yi-Chen Hsieh; Kai-Ping Chuang; Fu-Shiang Yang; Chun-I Wu

doi:10.1117/12.782996

27 November 2007 Whole visible range imaging ellipsometry

Hau-Wei Wang, Yi-Chen Hsieh, Kai-Ping Chuang, Fu-Shiang Yang, Chun-I Wu

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67230Q (2007) https://doi.org/10.1117/12.782996
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

The ellipsometric image contrast for patterned film in whole visible range is simulated and analyzed in this article. By the Fresnel equation and the Jones Matrix, the characteristic wavelength selection method to enhance the image contrast is built. The ellipsometric reflected intensity of specific thin film is nulled into dark by rotating the phase angle of compensator and the azimuth angle of polarizer in whole visible range, which results in higher contrast between non-null and null images after the proper wavelength selection. The approach enables the image defect recognition of patterned film more obvious than recent single wavelength imaging ellipsometry and white light reflective image.

Citation Download Citation

Hau-Wei Wang, Yi-Chen Hsieh, Kai-Ping Chuang, Fu-Shiang Yang, and Chun-I Wu "Whole visible range imaging ellipsometry", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67230Q (27 November 2007); https://doi.org/10.1117/12.782996

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