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27 November 2007 Study on laser damage properties of thin films
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Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67231K (2007) https://doi.org/10.1117/12.783185
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China
Abstract
Thin film plays an important part of an optical system, especially high power laser system. The anti-damage ability is an important index in evaluating their quality. Both diamond-like carbon thin film and HfO2/SiO2 thin film are good optical thin films. In this paper their laser damage properties have been tested according to ISO11254. The results of damage threshold of coatings are shown as follows: Compared to HfO2/SiO2 thin film system with a laser damage threshold of 3.0~7.4 J /cm2, the DLC film threshold is only 0.6 J/cm2, which is the result of strong absorption of DLC films to laser energy. And also we can conclude from the results that the damage of film is derived from defect-induced damage, but the damage mechanisms are different. The DLC thin film damage results from heat-stress while HfO2/SiO2 thin films' damage results from plasma ablation. Besides, the substrate of film, the films' structure and deposition methods are also important to film damage threshold. Under the same condition, the threshold of the film on Si substrate is lower than those on K9 glass; with the same substrate, the film threshold is dependent of film thickness. As for deposition methods, films deposited by using ion-assisted method have higher threshold than those without using ion-assisted method.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun-hong Su, Jun-qi Xu, and Song-lin Xie "Study on laser damage properties of thin films", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67231K (27 November 2007); https://doi.org/10.1117/12.783185
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