Analysis for nonlinear error of improved 2D-PSD and its applications

Tianze Li; Shuyun Wang; Boxue Tan; Hongmeng Yan

doi:10.1117/12.783191

17 January 2008 Analysis for nonlinear error of improved 2D-PSD and its applications

Tianze Li, Shuyun Wang, Boxue Tan, Hongmeng Yan

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67231P (2008) https://doi.org/10.1117/12.783191
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Expound the lateral photoeffect, the operating principle, architecture and characters of improved two dimensional position sensitive detector. A new bridge theory is put forward to analyze the reason of nonlinearity errors produced by the center and edge of 2D-PSD. A signal processing circuit of improved 2D-PSD including high-precision, low temperature excursion and high input impedance preamplifier, summator, subtracter and divider is used in high-precision laser collimation system. The signal processing circuit converts the optical signals processed by optical system including optical lenses, diaphragm, light filter etc into electrical signals, then the electrical signals will be sent into data acquisition system. The straightness measure results of work-piece will be showed on computer by the linearity evaluation software. The characters of this system: fast response, high-resolution position, real-time detection etc. In the end, measuring results and some important conclusions are presented.

Citation Download Citation

Tianze Li, Shuyun Wang, Boxue Tan, and Hongmeng Yan "Analysis for nonlinear error of improved 2D-PSD and its applications", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67231P (17 January 2008); https://doi.org/10.1117/12.783191

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KEYWORDS

Signal processing

Collimators

Bridges

Electrodes

Error analysis

Laser processing

Sensors

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